3:00 PM - 5:00 PM

[PS-6-12] Room-temperature Fabrication of Amorphous IGZO TFTs with Co-sputtered Zr_xSi_1-xO₂ Gate Dielectrics

P. Y. Liu¹, S. J. Wang¹, C. H. Hung¹, C. H. Wu², N. S. Wu¹,^○H. P. Yan¹, T. H. Lin¹ (1.National Cheng Kung Univ.(Taiwan), 2.Chung Hua Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2016.PS-6-12