High-Performance Surface Illumination-type Ge Photodetector for Optical Interconnection on 300mm-diameter of SOI substrate

J. Fujikata

doi:https://doi.org/10.7567/SSDM.2017.C-5-02

10:00 〜 10:15

[C-5-02] High-Performance Surface Illumination-type Ge Photodetector for Optical Interconnection on 300mm-diameter of SOI substrate

^○J. Fujikata¹, K. Kinoshita¹, S. Takahashi¹, T. Horikawa^1,2, M. Noguchi¹, K. Takemura¹, D. Okamoto¹, Y. Suzuki¹, M. Kurihara¹, Y. Hagihara¹, T. Nakamura¹, K. Kurata¹, T. Mogami¹ (1.PETRA (Japan), 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2017.C-5-02

2017 International Conference on Solid State Devices and Materials

[C-5-02] High-Performance Surface Illumination-type Ge Photodetector for Optical Interconnection on 300mm-diameter of SOI substrate