The Japan Society of Applied Physics

10:00 〜 10:15

[C-5-02] High-Performance Surface Illumination-type Ge Photodetector for Optical Interconnection on 300mm-diameter of SOI substrate

J. Fujikata1, K. Kinoshita1, S. Takahashi1, T. Horikawa1,2, M. Noguchi1, K. Takemura1, D. Okamoto1, Y. Suzuki1, M. Kurihara1, Y. Hagihara1, T. Nakamura1, K. Kurata1, T. Mogami1 (1.PETRA (Japan), 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2017.C-5-02