The Japan Society of Applied Physics

15:40 〜 16:10

[D-2-01 (Invited)] FinFET Split-Gate MONOS for Embedded Flash in 16/14nm-node and Beyond

S. Tsuda1, Y. Kawashima1, K. Sonoda1, A. Yoshitomi1, T. Mihara1, S. Narumi1, M. Inoue1, S. Muranaka1, T. Maruyama1, T. Yamashita1, Y. Yamaguchi1, D. Hisamoto2 (1.Renesas Electronics Corp. (Japan), 2.Hitachi, Ltd. (Japan))

https://doi.org/10.7567/SSDM.2017.D-2-01