15:40 〜 16:10

[D-2-01 (Invited)] FinFET Split-Gate MONOS for Embedded Flash in 16/14nm-node and Beyond

^○S. Tsuda¹, Y. Kawashima¹, K. Sonoda¹, A. Yoshitomi¹, T. Mihara¹, S. Narumi¹, M. Inoue¹, S. Muranaka¹, T. Maruyama¹, T. Yamashita¹, Y. Yamaguchi¹, D. Hisamoto² (1.Renesas Electronics Corp. (Japan), 2.Hitachi, Ltd. (Japan))

https://doi.org/10.7567/SSDM.2017.D-2-01