4:30 PM - 4:50 PM

[D-2-03] In-situ formation of Hf-based MONOS structure for nonvolatile memory application

^○S. Kudoh¹, M. Tsukazaki¹, S. Ishimatsu¹, S. Ohmi¹ (1.Tokyo Tech (Japan))

https://doi.org/10.7567/SSDM.2017.D-2-03