The Japan Society of Applied Physics

15:00 〜 15:15

[E-1-05 (Late News)] Improved Performance and Sufficient Reliability In0.53Ga0.47As FinFET Using NH3 Plasma Treatment

K. S. Yang1, Q. -H. Luc1, C. C. Chang1, J. W. Lin1, C. -C. F. Chiang1, H. B. Do1, M. T. H. Ha1, S. H. Huynh1, Y. D. Jin1, T. A. Nguyen1, Y. -C. Lin1, E. Y. Chang1 (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2017.E-1-05