The Japan Society of Applied Physics

11:15 〜 11:45

[E-6-01 (Invited)] Achieving BEOL Footprint-Efficient and Low Cost Monolithic 3D+ IoT Chip Using Low Thermal Budget Laser Technology

C. -C. Yang1, T. -Y. Hsieh1, W. -H. Huang1, J. -M. Shieh1, H. -H. Wang1, C. -H. Shen1, F. -K. Hsueh1, W. -K. Yeh1 (1.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2017.E-6-01