The Japan Society of Applied Physics

11:00 〜 11:20

[H-3-05] N5 BEOL Process Options Patterning flows Comparing 193immersion to Hybrid EUV or Full EUV

S. Lariviere1, B. Briggs1, C. Wilson1, D. Wan1, A. Mallik1, S. Decoster1, J. Bekaert1, V. Blanco1, M. Mao1, S. Paolillo1, B. K. Kotowska1, J. Versluijs1, J. Boemmels1, D. Trivkovic1, Z. Tokei1, G. Mcintyre1, D. Mocuta1 (1.IMEC (Belgium))

https://doi.org/10.7567/SSDM.2017.H-3-05