10:00 〜 10:20 [H-5-02] Evaluation of Substrate Noise Suppression Method to Mitigate Crosstalk among TSVs ○Y. Araga1, K. Kikuchi1, M. Aoyagi1 (1.AIST (Japan)) https://doi.org/10.7567/SSDM.2017.H-5-02