The Japan Society of Applied Physics

12:00 〜 12:15

[H-6-03] Fabrication of VTPC-TG Pixels for 3D Structure CMOS Image Sensor Applications

S.-K. Park1,D. Woo1, M.-K. Na1, P.-S. Kwag1, H.-R. Lee1, K.-W. Ro1, K.-H. Kim1, D.-K. Lee1, C. Hong1, I.-W. Cho1, J.-H. Park2, K.-D. Yoo2 (1.SK Hynix (Korea), 2.Hanyang Univ. (Korea))

https://doi.org/10.7567/SSDM.2017.H-6-03