The Japan Society of Applied Physics

15:00 〜 15:15

[J-1-06] Investigation of the effective net charge of strontium silicate layers on silicon substrates at changing annealing condition

S. Taniwaki1, H. Yoshida1, K. Arafune1, A. Ogura2, S. Satoh1, Y. Hotta1 (1.Univ. of Hyogo (Japan), 2.Meiji Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.J-1-06