3:00 PM - 3:15 PM
[J-1-06] Investigation of the effective net charge of strontium silicate layers on silicon substrates at changing annealing condition
○S. Taniwaki1, H. Yoshida1, K. Arafune1, A. Ogura2, S. Satoh1, Y. Hotta1
(1.Univ. of Hyogo (Japan), 2.Meiji Univ. (Japan))
https://doi.org/10.7567/SSDM.2017.J-1-06