CMOS Compatible Ferroelectric Devices for Beyond 1X nm Technology Nodes

S. Müller

doi:https://doi.org/10.7567/SSDM.2017.K-5-01

9:30 AM - 10:00 AM

[K-5-01 (Invited)] CMOS Compatible Ferroelectric Devices for Beyond 1X nm Technology Nodes

S. Müller¹,^○H. Mulaosmanovic², S. Slesazeck², J. Müller³, T. Mikolajick^2,4 (1.Ferroelectric Memory GmbH (Germany), 2.NaMLab gGmbH (Germany), 3.Fraunhofer IPMS (Germany), 4.IHM TU Dresden (Germany))

https://doi.org/10.7567/SSDM.2017.K-5-01

2017 International Conference on Solid State Devices and Materials

[K-5-01 (Invited)] CMOS Compatible Ferroelectric Devices for Beyond 1X nm Technology Nodes