Thermodynamic Analysis of the Surface Reactions in GaN MOVPE

K. Sekiguchi

doi:https://doi.org/10.7567/SSDM.2017.N-2-02

2017 International Conference on Solid State Devices and Materials

Sep 19, 2017 - Sep 22, 2017
Sendai International Center

4:10 PM - 4:25 PM

[N-2-02] Thermodynamic Analysis of the Surface Reactions in GaN MOVPE

^○K. Sekiguchi¹, H. Shirakawa¹, K. Chokawa¹, M. Araidai¹, Y. Kangawa^1,2, K. Kakimoto², K. Shiraishi¹ (1.Nagoya Univ. (Japan), 2.Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2017.N-2-02

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