[PS-13-03] Fabrication of Gate-All-Around Poly-Si Tube-channel Junctionless Field-Effect Transistors

^○Y. -T. Chang¹, K. -P. Peng¹, P. -W. Li¹, H. -C. Lin¹ (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2017.PS-13-03