[PS-13-04] Impact of Crystallinity of AlN Thermal Conductive Film on Thermoelectric Power of Silicon Nanowire Micro Thermoelectric Generator

^○R. Yamato¹, S. Hashimoto¹, T. Zhan¹, S. Oba¹, Y. Himeda¹, T. Matsukawa², T. Watanabe¹ (1.Waseda Univ. (Japan), 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2017.PS-13-04