[PS-3-10] Effects of Si Recess Structure on Performance and Reliability in High Voltage n-MOSFETs

C. -Y. Chen¹, J. F. Chen¹,^○Y. -L. Tsai¹, H. -T. Hsu², H. -P. Hwang² (1.National Cheng Kung Univ. (Taiwan), 2.Powerchip Tech. Corp. (Taiwan))

https://doi.org/10.7567/SSDM.2017.PS-3-10