The Japan Society of Applied Physics

[PS-3-10] Effects of Si Recess Structure on Performance and Reliability in High Voltage n-MOSFETs

C. -Y. Chen1, J. F. Chen1,Y. -L. Tsai1, H. -T. Hsu2, H. -P. Hwang2 (1.National Cheng Kung Univ. (Taiwan), 2.Powerchip Tech. Corp. (Taiwan))

https://doi.org/10.7567/SSDM.2017.PS-3-10