The Japan Society of Applied Physics

[PS-3-16 (Late News)] Low-Temperature Microwave Annealing Process for In0.53Ga0.47As MOSFETs

J. W. Lin1, Q. -H. Luc1, K. S. Yang1, C. -C. Chang1, C. -C. Fan Chiang1, H. B. Do1, H. M. T. Ha1, S. H. Huynh1, Y. D. Jin1, T. A. Nguyen1, Y. -C. Lin1, E. Y. Chang1 (1.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2017.PS-3-16