Experimental Investigation of Localized Stress Induced Leakage Current Distribution in Gate Dielectrics Using Array Test Circuit

2017 International Conference on Solid State Devices and Materials

Sep 19, 2017 - Sep 22, 2017
Sendai International Center

11:47 AM - 11:49 AM

^○H. Park¹, T. Suwa¹, R. Kuroda¹, A. Teramoto¹, S. Sugawa¹ (1.Tohoku Univ. (Japan))