2017 International Conference on Solid State Devices and Materials
Sep 19, 2017 - Sep 22, 2017 Sendai International Center
11:51 AM - 11:53 AM
[PS-8-09] Study on Fabrication of Yttrium Oxide Thin Films Using Mist CVD
○L. Liu1, M. Nishi1, S. Sato1, P. Rutthongjan1, M. Sakamoto1, Y. Kobayashi1, G. T. Dang1, E. K. C. Pradeep1, T. Kawaharamura1 (1.Kochi Univ. of Tech. (Japan))
