10:45 AM - 11:00 AM

[C-4-01] Sub-60mV/dec Subthreshold Swing on Reliability of Ferroelectric HfZrO_x Negative-Capacitacne FETs with DC Sweep and AC Stress Cycles

K.-T. Chen¹, C.-Y. Liao¹, R.-C. Hong¹, S.-S. Gu¹, Y.-C. Chou¹, Z.-Y. Wang¹, S.-Y. Chen¹, G.-Y. Siang¹, H.-Y. Chen¹, C. Lo¹, P.-G. Chen³, Y.-J. Lee¹, M.-H. Liao², K.-S. Li³, S.T. Chang⁴,^○M.-H. Lee¹ (1.National Taiwan Normal Univ. (Taiwan), 2.National Taiwan Univ. (Taiwan), 3.National Nano Device Lab. (Taiwan), 4.National Chung Hsing Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.C-4-01