Phase Transformation Kinetics of Hf-Zr-O Thin Films Examined through Wide Ranges of Annealing Temperature and Annealing Time

14:15 〜 14:30

[C-5-03] Phase Transformation Kinetics of Hf-Zr-O Thin Films Examined through Wide Ranges of Annealing Temperature and Annealing Time

^○S. Migita¹, H. Ota¹, K. Shibuya¹, H. Yamada¹, A. Sawa¹, T. Matsukawa¹, A. Toriumi² (1.AIST (Japan), 2.Univ. of Tokyo (Japan))