16:15 〜 16:30

[C-6-04] Investigation of Switching Characteristics for Silicon Doped Hafnium Oxide FeFET

^○T. Ali¹, P. Polakowski¹, S. Riedel¹, T. Büttner¹, T. Kämpfe¹, M. Rudolph¹, B. Pätzold¹, D. Löhr¹, R. Hoffmann¹, M. Czernohorsky¹, K. Kühnel¹, P. Steinke¹, K. Zimmermann¹, K. Biedermann¹, K. Seidel¹, J. Müller¹ (1.Fraunhofer Center Nanoelectronic Technologies (Germany))

https://doi.org/10.7567/SSDM.2018.C-6-04