14:00 〜 14:15

[C-8-01] Fabrication of InAs-on-Insulator structures by Smart Cut method with hydrogen implantation at room temperature

^○K. Sumita¹, K. Kato¹, M. Takenaka¹, S. Takagi¹ (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2018.C-8-01