3:30 PM - 3:45 PM

[C-8-07 (Late News)] Comprehensive Study of Variability in Poly-Si Channel Nanowire Transistor ~ Grain Boundary effect in Variability ~

^○K. Ota¹, T. Kawai¹, M. Saitoh¹ (1.Toshiba Memory Corp. (Japan))

https://doi.org/10.7567/SSDM.2018.C-8-07