A RESURF Structure with Nano-trenches and Fins for AlGaN/GaN Devices

2018 International Conference on Solid State Devices and Materials

2018年9月9日〜 2018年9月13日
University of Tokyo

10:00 〜 10:15

^○A. Zhang¹, Q. Zhou¹, C. Yang¹, Y. Shi¹, W. Chen¹, Z. Li¹, B. Zhang¹ (1.Univ. of Electronic Sci. and Tech. of China (China))