3:15 PM - 3:30 PM

[D-8-06] Impact of Al₂O₃ interlayer for metal-oxide-semiconductor capacitor on (111) oriented 3C-SiC for electronic device application

^○K. Yamamoto¹, D. Wang¹, H. Nakashima¹, S. Hishiki², K. Kawamura^2,1 (1.Kyushu University (Japan), 2.Air Water Inc. (Japan))

https://doi.org/10.7567/SSDM.2018.D-8-06