Optimum substrate design of planar type Si nanowire thermoelectric generator

K. Shima

doi:https://doi.org/10.7567/SSDM.2018.F-8-01

14:00 〜 14:15

[F-8-01] Optimum substrate design of planar type Si nanowire thermoelectric generator

^○K. Shima¹, M. Tomita¹, H. Zhang^1,2, T. Zhan¹, T. Matsukawa³, T. Matsuki³, T. Watanabe¹ (1.Waseda Univ. (Japan), 2.Gunma Univ. (Japan), 3.AIST (Japan))

https://doi.org/10.7567/SSDM.2018.F-8-01

2018 International Conference on Solid State Devices and Materials

[F-8-01] Optimum substrate design of planar type Si nanowire thermoelectric generator