Demonstration of a Silicon Thin Film, Phonon Engineered Thermoelectric Converter

T.-M. Bah

doi:https://doi.org/10.7567/SSDM.2018.F-8-03

14:30 〜 14:45

[F-8-03] Demonstration of a Silicon Thin Film, Phonon Engineered Thermoelectric Converter

^○T.-M. Bah^1,2, S. Didenko², S. Monfray¹, T. Skotnicki¹, F. Boeuf¹, E. Dubois², J.-F. Robillard² (1.STMicroelectronics (France), 2.Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. (France))

https://doi.org/10.7567/SSDM.2018.F-8-03

2018 International Conference on Solid State Devices and Materials

[F-8-03] Demonstration of a Silicon Thin Film, Phonon Engineered Thermoelectric Converter