The Japan Society of Applied Physics

09:30 〜 09:45

[G-3-02] CMOS Area Scaling And the Need for High Aspect Ratio Vias

B. Briggs1, S. Guissi2, C.J. Wilson1, J. Ryckaert1, S. Paolillo1, K. Vandersmissen1, J. Versluijs1, C. Lorant1, N. Heylen1, J. Boemmels1, Z. Tokei1, Y. Sherazi1, P. Weckx1, L. Kljucar1, M. Van Der Veen1, G. Boccardi1, V. DeHeyn1, A. Gupta1, J. Ervin3, M. Kamon3 (1.imec (Belgium), 2.Coventor (France), 3.Coventor Inc (USA))

https://doi.org/10.7567/SSDM.2018.G-3-02