The Japan Society of Applied Physics

10:00 〜 10:15

[G-3-04] Growth of Multi-Layer Graphene (MLG) Inside Si Deep Trench for 3D-LSI Application

M. Mariappan1, T. Akimoto2, H. Kawakami2, K. Ueno2, T. Fukushima1, M. Koyanagi1 (1.Tohoku University (Japan), 2.Shibaura Institute of Technology (Japan))

https://doi.org/10.7567/SSDM.2018.G-3-04