10:00 AM - 10:15 AM

[G-7-04] Implementation of a Monolithic Three-Axis Accelerometer Using an Improved CMOS MEMS Process

^○S.-H. Tseng¹, Y.-J. Wang¹, C.-Y. Yeh¹, H.-H. Tsai¹, Y.-Z. Juang¹ (1.National Chip Implementation Center (Taiwan))

https://doi.org/10.7567/SSDM.2018.G-7-04