The Japan Society of Applied Physics

4:00 PM - 4:15 PM

[H-2-02] Evaluation of Advanced Process Integration Options for next Generation of Si-Photonics platform

F. Boeuf1, C. Baudot1, P. Le Maitre1, N. Vulliet1, J. Planchot1, L. Babaud1, J.F. Carpentier1, S. Messaoudene2, M. Ben-Khedim1, P. Orlandi3, C. Durand1, A. Fincato3, S. Cremer1 (1.STMicroelectronics Crolles (France), 2.CEA-LETI (France), 3.STMicroelectronics Agrate (Italy))