4:00 PM - 4:15 PM

[H-2-02] Evaluation of Advanced Process Integration Options for next Generation of Si-Photonics platform

^○F. Boeuf¹, C. Baudot¹, P. Le Maitre¹, N. Vulliet¹, J. Planchot¹, L. Babaud¹, J.F. Carpentier¹, S. Messaoudene², M. Ben-Khedim¹, P. Orlandi³, C. Durand¹, A. Fincato³, S. Cremer¹ (1.STMicroelectronics Crolles (France), 2.CEA-LETI (France), 3.STMicroelectronics Agrate (Italy))

https://doi.org/10.7567/SSDM.2018.H-2-02