Analysis of SU-8/CYTOP membrane waveguide and metal grating coupler for organic membrane photonic integrated circuits

K. Masuda

doi:https://doi.org/10.7567/SSDM.2018.H-5-02

14:00 〜 14:15

[H-5-02] Analysis of SU-8/CYTOP membrane waveguide and metal grating coupler for organic membrane photonic integrated circuits

^○K. Masuda¹, T. Amemiya^1,2, H. Kagami¹, N. Nishiyama^1,2, S. Arai^1,2 (1.Department of Electrical and Electronic Engineering, Tokyo Tech (Japan), 2.IIR, Tokyo Tech (Japan))

https://doi.org/10.7567/SSDM.2018.H-5-02

2018 International Conference on Solid State Devices and Materials

[H-5-02] Analysis of SU-8/CYTOP membrane waveguide and metal grating coupler for organic membrane photonic integrated circuits