The Japan Society of Applied Physics

16:30 〜 16:45

[J-2-03] Simplified and Disposal CMOS Chip Fabrication for Biomedical Application

T. Tabei1, T. Sato1, T. Meguro1, K. Okada1, S. Yamada1, Y. Amemiya1, S. Yokoyama1, A. Nakamura2, H. Murakami2, S. Nishimura3, K. Miyao3, S. Makihira3, R. Shimizu3, R. Mihara3, M. Furuse3 (1.Res. Inst. for Nanodevice and Bio Syst., Hiroshima Univ. (Japan), 2.National Inst. of Tech., Kurume College (Japan), 3.National Inst. of Tech., Oshima College (Japan))

https://doi.org/10.7567/SSDM.2018.J-2-03