16:30 〜 16:45

[J-2-03] Simplified and Disposal CMOS Chip Fabrication for Biomedical Application

^○T. Tabei¹, T. Sato¹, T. Meguro¹, K. Okada¹, S. Yamada¹, Y. Amemiya¹, S. Yokoyama¹, A. Nakamura², H. Murakami², S. Nishimura³, K. Miyao³, S. Makihira³, R. Shimizu³, R. Mihara³, M. Furuse³ (1.Res. Inst. for Nanodevice and Bio Syst., Hiroshima Univ. (Japan), 2.National Inst. of Tech., Kurume College (Japan), 3.National Inst. of Tech., Oshima College (Japan))

https://doi.org/10.7567/SSDM.2018.J-2-03