3:45 PM - 4:00 PM

[J-6-02] High Sensitivity Compact Gas Concentration Sensor with Heating Function for High Precision Trimethyl Aluminum Gas Supply System

^○H. Ishii¹, M. Nagase², N. Ikeda², Y. Shiba¹, Y. Shirai¹, R. Kuroda¹, S. Sugawa¹ (1.Tohoku University (Japan), 2.Fujikin Inc. (Japan))

https://doi.org/10.7567/SSDM.2018.J-6-02