9:30 AM - 9:45 AM

[K-7-02] The Characteristics of MgO Sensing Membrane applied in Electrolyte-Insulator-Semiconductor after Rapid Thermal annealing in O₂ and N₂ ambient

^○M. Das¹, C.L. Chang¹, C.H. Kao¹, T. Chakraborty¹, C.F. Lin¹ (1.Chang Gung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.K-7-02