Effect of Laser Power on the Surface Texture Transition of the Thin Silicon-Films from Grain-Boundary Free (100) to Twinned (211) in CW Laser Lateral Crystallization

15:45 〜 16:00

[N-2-02] Effect of Laser Power on the Surface Texture Transition of the Thin Silicon-Films from Grain-Boundary Free (100) to Twinned (211) in CW Laser Lateral Crystallization

^○N. Sasaki^1,2, M. Arif², Y. Uraoka² (1.Sasaki Consulting (Japan), 2.Nara Inst. of Sci. and Tech. (Japan))