1:45 PM - 2:00 PM

[N-5-02] Poly-Si Thin-Film-Transistors with Dot-Array Doping Channels Fabricated by Nano Imprint Lithography

^○H.J.H. Chen¹, S. Shih¹, S.L. Tseng¹, T.N. Lee², S.Z. Chen², K.C. Hsieh² (1.National Chi Nan Univ. (Taiwan), 2.National Tsing Hua Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.N-5-02