The Japan Society of Applied Physics

2:00 PM - 2:15 PM

[N-5-03] RF Characteristics of Trigate Poly-Si Thin-Film Transistors with Different Layout Geometries

B.Y. Chen1,2, K.M. Chen1, Y.S.J. Shiao1, C.J. Lin1, G.W. Huang1, H.C. Chen1, F.K. Hsueh1, C.H. Shen1, J.M. Shieh1, E.Y. Chang2 (1.National Nano Device Labs. (Taiwan), 2.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.N-5-03