14:00 〜 14:15

[N-5-03] RF Characteristics of Trigate Poly-Si Thin-Film Transistors with Different Layout Geometries

^○B.Y. Chen^1,2, K.M. Chen¹, Y.S.J. Shiao¹, C.J. Lin¹, G.W. Huang¹, H.C. Chen¹, F.K. Hsueh¹, C.H. Shen¹, J.M. Shieh¹, E.Y. Chang² (1.National Nano Device Labs. (Taiwan), 2.National Chiao Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.N-5-03