09:00 〜 09:15

[N-7-01] Enhancement Performance of Co-sputtered Ti-IGZO Thin-Film Transistors with Al-ZrO₂ Gate Dielectric

C.X. Lin¹, S.J. Wang¹, R.M. Ko¹, S.Y. Wang¹, H.Y. Chen¹, C.K. Liao¹, S.T. Hsiao¹,^○B.C. You¹ (1.Univ. of Cheng Kung (Taiwan))

https://doi.org/10.7567/SSDM.2018.N-7-01