10:00 AM - 10:15 AM

[N-7-05] The Inverted-Staggered InGaZnO TFT with Hydrogen-Free PECVD-SiO₂ Etch-Stopper and Passivation Layers

^○T. Kobayashi¹, H. Zama¹ (1.ULVAC, Inc. (Japan))

https://doi.org/10.7567/SSDM.2018.N-7-05