10:00 〜 10:15 [N-7-05] The Inverted-Staggered InGaZnO TFT with Hydrogen-Free PECVD-SiO2 Etch-Stopper and Passivation Layers ○T. Kobayashi1, H. Zama1 (1.ULVAC, Inc. (Japan)) https://doi.org/10.7567/SSDM.2018.N-7-05