11:00 〜 13:30

[PS-1-07] Stochastic Simulation of Breakdown Process for High-k Dielectrics

^○W. Liu¹, B. Chen¹, S. Gao¹, Z. Zheng¹, Y. Zhao¹ (1.Zhejiang Univ. (China))

https://doi.org/10.7567/SSDM.2018.PS-1-07