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[PS-1-27 (Late News)] Nanosheet Number and Width Optimization of Multi Stacked NanoSheet FET for 7-nm Node SoC Application

^○J.-S. Yoon¹, J. Jeong¹, S. Lee¹, R.-H. Baek¹ (1.Pohang University of Science and Technology (Korea))

https://doi.org/10.7567/SSDM.2018.PS-1-27